Profiling of patterned metal layers by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS)

  1. Bi, M.
  2. Ruiz, A.M.
  3. Gornushkin, I.
  4. Smith, B.W.
  5. Winefordner, J.D.
Aldizkaria:
Applied Surface Science

ISSN: 0169-4332

Argitalpen urtea: 2000

Alea: 158

Zenbakia: 3

Orrialdeak: 197-204

Mota: Artikulua

DOI: 10.1016/S0169-4332(00)00027-1 GOOGLE SCHOLAR

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