Profiling of patterned metal layers by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS)

  1. Bi, M.
  2. Ruiz, A.M.
  3. Gornushkin, I.
  4. Smith, B.W.
  5. Winefordner, J.D.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2000

Volume: 158

Issue: 3

Pages: 197-204

Type: Article

DOI: 10.1016/S0169-4332(00)00027-1 GOOGLE SCHOLAR
Data source: Scopus